Control of Nano-Step Structures on Sapphire Wafer Surface by Focused Ion Beam Processing
نویسندگان
چکیده
منابع مشابه
Focused Ion Beam Nano-structuring for Applications in Photonics
To date, nano-and micro-structuring has commonly been implemented by a combination of specifically optimized processes of electron-beam lithography and reactive ion etching, thus limiting the range of materials that can be structured to only a few. In this talk we will introduce focused ion beam (FIB) milling as an emerging technology that enables fast, reliable and well-controlled nanometer-si...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2005
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.113.478